Modelling methodology of MEMS structures based on Cosserat theory

Modelling MEMS involves a variety of software tools that deal with the analysis of complex geometrical structures and the assessment of various interactions among different energy domains and components. Moreover, the MEMS market is growing very fast, but surprisingly, there is a paucity of modelling and simulation methodology for precise performance verification of MEMS products in the nonlinear regime. For that reason, an efficient and rapid modelling approach is proposed that meets the linear and nonlinear dynamic behaviour of MEMS systems.Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838

Megasonic Enhanced Electrodeposition

A novel way of filling high aspect ratio vertical interconnection (microvias) with an aspect ratio of >2:1 is presented. High frequency acoustic streaming at megasonic frequencies enables the decrease of the Nernst-diffusion layer down to the sub-micron range, allowing thereby conformal electrodeposition in deep grooves. Higher throughput and better control over the deposition properties are possible for the manufacturing of interconnections and metal-based MEMS.Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838

Porous Alumina Based Capacitive MEMS RH Sensor

The aim of a joint research and development project at the BME and HWU is to produce a cheap, reliable, low-power and CMOS-MEMS process compatible capacitive type relative humidity (RH) sensor that can be incorporated into a state-of-the-art, wireless sensor network. In this paper we discuss the preparation of our new capacitive structure based on post-CMOS MEMS processes and the methods which were used to characterize the thin film porous alumina sensing layer. The average sensitivity is approx. 15 pF/RH% which is more than a magnitude higher than the values found in the literature. The sensor is equipped with integrated resistive heating, which can be used for maintenance to reduce drift, or for keeping the sensing layer at elevated temperature, as an alternative method for temperature-dependence cancellation.Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838

Effect of fluid dynamics and device mechanism on biofluid behaviour in microchannel systems: modelling biofluids in a microchannel biochip separator

Biofluid behaviour in microchannel systems is investigated in this paper through the modelling of a microfluidic biochip developed for the separation of blood plasma. Based on particular assumptions, the effects of some mechanical features of the microchannels on behaviour of the biofluid are explored. These include microchannel, constriction, bending channel, bifurcation as well as channel length ratio between the main and side channels. The key characteristics and effects of the microfluidic dynamics are discussed in terms of separation efficiency of the red blood cells with respect to the rest of the medium. The effects include the Fahraeus and Fahraeus-Lindqvist effects, the Zweifach-Fung bifurcation law, the cell-free layer phenomenon. The characteristics of the microfluid dynamics include the properties of the laminar flow as well as particle lateral or spinning trajectories. In this paper the fluid is modelled as a single-phase flow assuming either Newtonian or Non-Newtonian behaviours to investigate the effect of the viscosity on flow and separation efficiency. It is found that, for a flow rate controlled Newtonian flow system, viscosity and outlet pressure have little effect on velocity distribution. When the fluid is assumed to be Non-Newtonian more fluid is separated than observed in the Newtonian case, leading to reduction of the flow rate ratio between the main and side channels as well as the system pressure as a whole

The Fabrication and Integration of a 15 MHz Array Within a Biopsy Needle

It is proposed that integrating ultrasound transducer arrays at the tip of tools such as biopsy needles could enable valuable, real-time image feedback during interventional procedures. High-resolution ultrasound imaging has the potential to aid navigation of interventional tools, and to assist diagnosis or treatment via in-vivo tissue characterisation in the breast, amongst many other applications. In order to produce miniature transducer arrays incorporated within biopsy needle-sized packages (2-5 mm diameter), the challenges in micromachining and handling transducer materials at this scale must be overcome. This paper presents fabrication processes used in the micromachining of a 16 element 15 MHz PIN-PMN-PT piezocrystal-polymer composite array and its integration into an 11 G breast biopsy needle. Particular emphasis is given to the manufacturing of the 1-3 dice-and-fill piezocrystal composite, and establishing electrical interconnects. Characterisation measurements have demonstrated operation of each of the 16 elements within the needle case

Frequency effect on streaming phenomenon induced by Rayleigh surface acoustic wave in microdroplets

Acoustic streaming of ink particles inside a water microdroplet generated by a surface acoustic wave(SAW) has been studied numerically using a finite volume numerical method and these results have been verified using experimental measurements. Effects of SAW excitation frequency, droplet volume, and radio-frequency (RF) power are investigated, and it has been shown that SAW excitation frequency influences the SAWattenuation length, lSAW , and hence the acoustic energy absorbed by liquid. It has also been observed that an increase of excitation frequency generally enhances the SAW streaming behavior. However, when the frequency exceeds a critical value that depends on the RF power applied to the SAW device, weaker acoustic streaming is observed resulting in less effective acoustic mixing inside the droplet. This critical value is characterised by a dimensionless ratio of droplet radius to SAWattenuation length, i.e., Rd/lSAW . With a mean value of Rd/lSAW  ≈ 1, a fast and efficient mixing can be induced, even at the lowest RF power of 0.05 mW studied in this paper. On the other hand, for the Rd/lSAW ratios much larger than ∼1, significant decreases in streaming velocities were observed, resulting in a transition from regular (strong) to irregular (weak) mixing/flow. This is attributed to an increased absorption rate of acoustic wave energy that leaks into the liquid, resulting in a reduction of the acoustic energy radiated away from the SAW interaction region towards the droplet free surface. It has been demonstrated in this study that a fast and efficient mixing process with a smaller RF power could be achieved if the ratio of Rd/lSAW  ≤ 1 in the SAW-droplet based microfluidics